By C. Lu,A. W. Czanderna
Comprised of 10 chapters, this quantity starts with a old historical past and evaluation of purposes of piezoelectric quartz crystal microbalances, by way of an research of the speculation and perform of microbalances. The position of acoustic impedance in a quartz crystal microbalance and layout concerns for a microbalance are given emphasis. next chapters specialize in functions of microbalances in skinny movie deposition approach keep an eye on; simultaneous size of mass and temperature; floor technology and analytical chemistry; plasma-assisted etching and house process illness reviews; and aerosol mass measurement.
This monograph should be of curiosity to scholars and practitioners of physics, chemistry, and fabrics science.
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Applications of Piezoelectric Quartz Crystal Microbalances (Methods and Phenomena) by C. Lu,A. W. Czanderna